Year: 2005
Type: article
Abstract: A diaphragm-based piezoelectric microspeaker is fabricated on a heavily compressive silicon–nitride film, and is compared to commercial speakers. The largest sound pressure level (SPL) produced by the fabricated microspeaker is 92 dB (when measured 2 mm away from the microspeaker in open field) at around 3 kHz for 6 Vpeak-to-peak input. The microspeaker produces a comparable sound output as a commercial piezo-ceramic and electro-dynamic speaker used in current cellular phones. The keys to this success are as follows: (1) the usage of a diaphragm that has a very high compressive residual stress, high enough to cause the diaphragm to be wrinkled and (2) the usage of high quality ZnO film deposited by two-step deposition technique.
DOI: 10.1143/jjap.44.3836
Authors: Seung Hwan Yi, Eun Sok Kim
Institution: University of Southern California
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W1970641132