Work

Characterization and fabrication of MOEMS-based diffractive optical switching elements

Year: 2006

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.647806

Authors: Jaap Verheggen, Ganesh Panaman, James Castracane

Institution: University at Albany, State University of New York

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W1970837889

FWCI: 1.059

Cites:

Cited by: 5

Related to: 10