Work

Simplified rule generation for automated rules-based optical enhancement

Year: 1995

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.228212

Authors: Oberdan W. Otto, Joseph G. Garofalo, Richard C. Henderson

Institution: AT&T (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1971736111

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