Work

The intrinsic stress of polycrystalline and epitaxial thin metal films

Year: 1994

Type: article

Source: Journal of Physics Condensed Matter

DOI: 10.1088/0953-8984/6/45/005

Author: R Koch

Institution: Freie Universität Berlin

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1972074028

FWCI: 11.61

Cites: 101

Cited by: 452

Related to: 10