Work

Thermal conductivity of thin films: Measurements and understanding

Year: 1989

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.576265

Authors: David G. Cahill, Henry E. Fischer, Tom Klitsner, E. T. Swartz, R. O. Pohl

Institution: Cornell University

Language: English

Topic: Thermal properties of materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Semiconductor Research Corporation

OpenAlex ID: W1972680534

FWCI: 4.346

Cites:

Cited by: 330

Related to: 10