Nanopatterning: Graphoepitaxy of Block‐Copolymer Self‐Assembly Integrated with Single‐Step ZnO Nanoimprinting (Small 10/2012)
Year: 2012
Type: article
Abstract: The cover image features a highly efficient nanolithography technique with a minimal number of processing steps, integrating directed block-copolymer self-assembly with single-step ZnO nanoimprinting. Diverse shapes of the ZnO patterns are readily attainable by UV-assisted, single-step imprinting of sol–gel precursors. The ZnO provides high thermal stability and low line-edge roughness, both of which are crucial for further directed blockcopolymer assembly. According to the ZnO trench shape, various self-assembled nanoscale morphologies—such as surface-parallel nanocylinder arrays, hierarchical nanopatterns of surface-parallel and vertical cylinder arrays, and co-axial nano-ring arrays—can be formed in the graphoepitaxially assembled block-copolymer thin films. For more information, please read the Full Paper “Graphoepitaxy of Block-Copolymer Self-Assembly Integrated with Single-Step ZnO Nanoimprinting” by S. O. Kim, J.-H. Jeong, and co-workers, beginning on page 1563.
Source: Small
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W1972785863