Work

Hybrid bendable stamp copies for molding fabricated by nanoimprint lithography

Year: 2005

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2004.12.077

Authors: Helmut Schift, Sunggook Park, Jens Gobrecht, Fabian Meier, Werner Raupach, Konrad Vogelsang

Institutions: Paul Scherrer Institute, FHNW University of Applied Sciences and Arts Northwestern Switzerland

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Bergische Universität Wuppertal

OpenAlex ID: W1972982705

FWCI: 0.247

Cites: 5

Cited by: 13

Related to: 10