Work

Thermally actuated probe array for parallel dip-pen nanolithography

Year: 2004

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.1805544

Authors: Xuefeng Wang, David A. Bullen, Jun Zou, Chang Liu, Chad A. Mirkin

Institutions: University of Illinois Urbana-Champaign, Northwestern University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1973185873

FWCI: 2.283

Cites: 8

Cited by: 57

Related to: 10