Work

Mass Spectral Investigation of the Radio-Frequency Plasma Deposition of Hexamethyldisiloxane

Year: 1997

Type: article

Source: The Journal of Physical Chemistry B

DOI: 10.1021/jp970663b

Authors: M. R. Alexander, F. R. Jones, R. D. Short

Institution: University of Sheffield

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1973214416

FWCI: 3.009

Cites: 9

Cited by: 96

Related to: 10