Work

Determination of mechanical material properties of piezoelectric ZnO films

Year: 1998

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.320160

Authors: Stefan Koller, V. Ziebart, Oliver Paul, Oliver Brand, Henry Baltes, Pasqualina M. Sarro, Michael J. Vellekoop

Institutions: ETH Zurich, Delft University of Technology

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Eidgenössische Technische Hochschule Zürich

OpenAlex ID: W1973222582

FWCI:

Cites:

Cited by: 4

Related to: 10