Work

Comparative study of kinetic energy spectra and mass distributions of Ta+ ions sputtered from tantalum by atomic and molecular ion bombardment

Year: 1998

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/s0168-583x(97)00861-6

Authors: S.F. Belykh, U.Kh. Rasulev, A.V. Samartsev, I.V. Veryovkin

Institution: Academy of Sciences Republic of Uzbekistan

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1973404742

FWCI: 4.944

Cites: 26

Cited by: 43

Related to: 10