Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses
Year: 2003
Type: article
Abstract: Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated.
Source: Applied Physics Letters
DOI: 10.1063/1.1569987
Institutions: Japan Science and Technology Agency, Tokushima University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W1973431252
