Multidirectional UV Lithography for Complex 3-D MEMS Structures
Year: 2006
Type: article
Authors: Y.-K. Yoon, J.-H. Park, M.G. Allen
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1975101083