Work

Study of microstructure deflections and film/substrate curvature under generalized stress fields and mechanical properties

Year: 2012

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2012.02.014

Authors: Massimo Camarda, Ruggero Anzalone, Antonino La Magna, Francesco La Via

Institution: Institute for Microelectronics and Microsystems

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1975707802

FWCI: 2.965

Cites: 17

Cited by: 8

Related to: 10