Work

Anomalous Large Thermoelectric Power on Heavily B-Doped SiGe Thin Films with Thermal Annealing

Year: 2002
Type: article
Abstract: The thermoelectric properties of heavily B-doped SiGe thin films were studied. The electrical resistivity in the high-temperature region was very low, which suggests the possibility of high-temperature use of heavily doped SiGe films. After thermal annealing, the low-temperature deposited samples showed collapse of the superlattice structure. As deposited condition, the samples might be in amorphous like SiGe thin films apart from good crystallinity. In these films, the anomalous large thermoelectric power was observed in the room temperature region. The power factor reached 4 × 10 0 W/mK 2 at 400 K and 1 × 10 0 W/mK 2 at 900 K.
Language: English
Open Access status: bronze
OpenAlex ID: W1976652961
FWCI: 0.65
Cites:
Cited by: 13
Related to: 10