Work

Si Ultra Shallow Junctions Dopant Profiling with ADF-STEM

Year: 2007

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-1026-c09-04

Authors: Andrea Parisini, D. Giubertoni, M. Bersani, V. Morandi, P. G. Merli, J. A. van den Berg

Institutions: Fondazione Bruno Kessler, University of Salford

Language: English

Topic: Advanced Electron Microscopy Techniques and Applications

Subfield: Structural Biology

Field: Biochemistry, Genetics and Molecular Biology

Domain: Life Sciences

Open Access status: closed

OpenAlex ID: W1976788816

FWCI: 0.266

Cites: 22

Cited by: 1

Related to: 10