Work

Approaches to nanofabrication on Si(100) surfaces: Selective area chemical vapor deposition of metals and selective chemisorption of organic molecules

Year: 1998

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.590426

Authors: G. C. Abeln, M. C. Hersam, D. S. Thompson, S.-T. Hwang, H. Choi, J. S. Moore, J. W. Lyding

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1976874170

FWCI: 3.307

Cites: 11

Cited by: 55

Related to: 10