Tailoring nanoporous materials by atomic layer deposition
Year: 2011
Type: review
Source: Chemical Society Reviews
DOI: 10.1039/c1cs15091j
Institutions: Ghent University, KU Leuven, Boston University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1977016631