Silicon microring resonators with 1.5-μm radius
Year: 2008
Type: article
Abstract: We demonstrate a junction between a silicon strip waveguide and an ultra-compact silicon microring resonator that minimizes spurious light scattering and increases the critical dimensions of the geometry. We show cascaded silicon microring resonators with radii around 1.5 microm and effective mode volumes around 1.0 microm(3) that are critically coupled to a waveguide with coupled Q's up to 9,000. The radius of 1.5 microm is smaller than the operational wavelength, and is close to the theoretical size limit of the silicon microring ring resonator for the same Q. The device is fabricated with a widely-available SEM-based lithography system using a stitch-free design based on a U-shaped waveguide.
Source: Optics Express
DOI: 10.1364/oe.16.004309
Institution: Hewlett-Packard (United States)
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,270
OpenAlex ID: W1977969953