Work

Silicon isotropic and anisotropic etching for MEMS applications

Year: 2012

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-012-1552-7

Authors: S. Negi, R. Bhandari

Institutions: University of Utah, Blackrock Microsystems (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Institutes of Health

OpenAlex ID: W1978208014

FWCI:

Cites: 10

Cited by: 21

Related to: 10