Work

Calibration of ultrahigh vacuum gauge from 10−9 Pa to 10−5 Pa by the two-stage flow-dividing system

Year: 2011

Type: article

Source: Vacuum

DOI: 10.1016/j.vacuum.2011.06.012

Authors: H. Yoshida, M. Hirata, H. Akimichi

Institutions: National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology

Language: English

Topic: Scientific Measurement and Uncertainty Evaluation

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W1978597420

FWCI: 1.017

Cites: 18

Cited by: 13

Related to: 10