Work

Laser Optogalvanic Monitoring of SiH in a Chemical Vapor Deposition Glow Discharge

Year: 1986

Type: article

Source: Applied Spectroscopy

DOI: 10.1366/0003702864508881

Authors: William G. Tong, Robert W. Shaw

Institution: Oak Ridge National Laboratory

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: New Mexico State University, Korea Electric Power Corporation

OpenAlex ID: W1979480491

FWCI: 1.567

Cites: 22

Cited by: 11

Related to: 10