Work

Dynamic Maskless Holographic Lithography

Year: 2007

Type: conference-paper

Source: IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications

DOI: 10.1115/detc2007-35164

Authors: Nathan J. Jenness, Kurt D. Wulff, Matthew S. Johannes, Daniel G. Cole, Robert L. Clark

Institutions: Duke University, University of Pittsburgh

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1979501770

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