Work

Low-pressure microwave plasma nucleation and deposition of diamond films

Year: 1992

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(92)90513-b

Authors: Y.H. Shing, F.S. Pool, D.H. Rich

Institutions: California Institute of Technology, Jet Propulsion Laboratory

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1979653087

FWCI: 2.118

Cites: 15

Cited by: 14

Related to: 10