Work

Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing

Year: 2005

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.2006210

Authors: Xuefeng Wang, Loren Vincent, David Bullen, Jun Zou, Chang Liu

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1980576115

FWCI: 0.482

Cites: 16

Cited by: 6

Related to: 10