Work

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

Year: 2005

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2005.07.005

Authors: Alireza Modafe, Nima Ghalichechian, Michael Powers, Michael Khbeis, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1980638156

FWCI: 3.177

Cites: 26

Cited by: 61

Related to: 10