Work

Fundamental understanding and modeling of reactive sputtering processes

Year: 2005

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2004.10.051

Authors: S. Berg, T. Nyberg

Institution: Uppsala University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Stiftelsen för Strategisk Forskning

OpenAlex ID: W1980929018

FWCI: 38.93

Cites: 22

Cited by: 758

Related to: 10