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RF-Plasma Deposition Of Hydrogenated Hard Carbon Thin Films

Year: 1983

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.935534

Authors: A. Bubenzer, B. Dischler, G. Brandt, P. Koidl

Institutions: Fraunhofer Institute for Applied Solid State Physics, Fraunhofer-Gesellschaft

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1981106588

FWCI: 2.114

Cites:

Cited by: 2

Related to: 10