Deep PFCB polymer etch development for photonic devices
Year: 2005
Type: conference-paper
DOI: 10.1117/12.591161
Authors: Jaime Cardenas, Gregory P. Nordin
Institution: University of Alabama in Huntsville
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1981829339