Reduction of Surface Roughness in Epitaxially Grown Germanium by Controlled Thermal Oxidation
Year: 2015
Type: article
Source: IEEE Electron Device Letters
Authors: Woo-Shik Jung, Ju Hyung Nam, Ashish Pal, Jae Hyung Lee, Yeul Na, Youngsik Kim, Jin Hyung Lee, Krishna C. Saraswat
Institution: Stanford University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W1982154659