Data analysis for spectroscopic ellipsometry
Year: 1993
Type: article
Source: Thin Solid Films
Author: G.E. Jellison
Institution: Oak Ridge National Laboratory
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: U.S. Department of Energy
Award: G361195141
OpenAlex ID: W1982729385