Work

Tubular hollow cathode sputtering onto substrates of complex shape

Year: 1975

Type: article

Source: Journal of Vacuum Science and Technology

DOI: 10.1116/1.568631

Authors: John A. Thornton, Virgle L. Hedgcoth

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1983532124

FWCI: 4.567

Cites:

Cited by: 41

Related to: 10