Work

Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging

Year: 2013

Type: article

Abstract: We demonstrate a 3-D scanning micromirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical-systems (MEMS) technology. 2-D beam scanning is achieved with a biaxial gimbal structure and focus control is obtained with a deformable mirror membrane surface. The micromirror with 800 micrometer diameter is designed to be sufficiently compact and efficient so that it can be incorporated into an endoscopic imaging probe in the future. The design, fabrication and characterization of the device are described in this paper. Using the focus-tracking MEMS scanning mirror, we achieved an optical scanning range of >16 degrees with <40 V actuation voltage at resonance and a tunable focal length between infinity and 25 mm with <100V applied bias.

Source: Optics Express

DOI: 10.1364/oe.21.023934

Authors: Matthew Strathman, Yunbo Liu, Xingde Li, Lih Y. Lin

Institutions: University of Washington, Johns Hopkins University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funders: University of Washington, National Institutes of Health, National Institute of Biomedical Imaging and Bioengineering