Work

An approach for efficiently locating and electrically contacting nanostructures fabricated via UHV-STM lithography on Si(100)

Year: 1999

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/s0167-9317(99)00203-8

Authors: M.C. Hersam, G.C. Abeln, J.W. Lyding

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1984470148

FWCI: 1.781

Cites: 3

Cited by: 14

Related to: 10