Blended novolac resins with improved lithographic performance
Year: 1993
Type: conference-paper
DOI: 10.1117/12.154795
Authors: Thomas J. Lynch, Chet J. Sobodacha, Valerie R. Paradis, Dana L. Durham, Anthony Canize
Institution: Celanese (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1984532465