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Polymerization-induced diffusion as a tool to generate periodic relief structures: a combinatorial study

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Year: 2006
Type: conference-paper
Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
DOI: 10.1117/12.649023
Authors: Carlos Sánchez, Berend-Jan de Gans, Dimitri Kozodaev, Alexander Alexeev, Michael J. Escuti, Chris van Heesch, Thijs Bel, Ulrich S. Schubert, Cees W. M. Bastiaansen, Dirk J. Broer
Institutions: Eindhoven University of Technology, Philips (Netherlands)
Language: English

Topic: Nanofabrication and Lithography Techniques
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed
OpenAlex ID: W1984762550
FWCI:
Cites: 2
Cited by: 2
Related to: 10
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