Work

Design, simulation and characterization of an inertia micro-switch fabricated by non-silicon surface micromachining

Year: 2007

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/17/8/024

Authors: Zhuoqing Yang, Guifu Ding, Weiqiang Chen, Shi Fu, Xiaofeng Sun, Xiaolin Zhao

Institution: Shanghai Jiao Tong University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1984929331

FWCI: 3.468

Cites: 14

Cited by: 43

Related to: 10