Work

Rare earth focused ion beam implantation utilizing Er and Pr liquid alloy ion sources

Year: 1999

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.591067

Authors: L. C. Chao, B. K. Lee, C. J. Chi, J. Cheng, I. Chyr, A. J. Steckl

Institution: University of Cincinnati

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985030375

FWCI: 1.894

Cites: 25

Cited by: 15

Related to: 10