Optical interferometric characterization of membrane curvature in boron-doped Si microstructures
Year: 1997
Type: conference-paper
DOI: 10.1117/12.284474
Authors: Jason W. Weigold, Wen Han Juan, Stella W. Pang, Jeffrey T. Borenstein
Institutions: University of Michigan, Draper Laboratory
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1985132671