Work

Simulation metamodel development using uniform design and neural networks for automated material handling systems in semiconductor wafer fabrication

Year: 2007

Type: article

Source: Simulation Modelling Practice and Theory

DOI: 10.1016/j.simpat.2007.05.006

Authors: Yiyo Kuo, Taho Yang, Brett A. Peters, Ihui Chang

Institutions: CTBC Business School, National Cheng Kung University, Texas A&M University, Taiwan Semiconductor Manufacturing Company (Taiwan)

Language: English

Topic: Simulation Techniques and Applications

Subfield: Management Science and Operations Research

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W1985270437

FWCI: 8.13

Cites: 49

Cited by: 71

Related to: 10