Work

Summary Abstract: Investigation of the interface chemistry of titanium–tungsten Schottky barrier contacts to silicon by Auger spectroscopy

Year: 1985

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.573363

Authors: J. E. Lewis, M. O. Aboelfotoh, P. S. Ho

Institution: IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985310841

FWCI:

Cites:

Cited by: 1

Related to: 10