Work

Defect-Induced Shifts in the Elastic Constants of Silicon

Year: 2002

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-741-j5.26

Authors: Clark L. Allred, Jeffrey T. Borenstein, Marc S. Weinberg, Xianglong Yuan, Martin Z. Bazant, Linn W. Hobbs

Institutions: Draper Laboratory, U.S. Air Force Institute of Technology, Massachusetts Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985331008

FWCI:

Cites: 18

Cited by: 1

Related to: 10