Work

An 8192-channel Grating Light Valve for Ultra-Violet Direct Write lithography

Year: 2012

Type: conference-paper

Source: International Conference on Optical MEMS and Nanophotonics

DOI: 10.1109/omems.2012.6318866

Authors: A. Payne, G. Myatt, J. Hunter, M. Yeung, J. Lu, G. Beach, A. Volchegursky, L. Eng

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985435752

FWCI: 0.409

Cites:

Cited by: 4

Related to: 10