A Structured Routing Architecture for Practical Application of Character Projection Method in Electron-Beam Direct Writing
Year: 2014
Type: article
Authors: Rimon IKENO, Takashi MARUYAMA, Satoshi KOMATSU, Tetsuya IIZUKA, Makoto IKEDA, Kunihiro ASADA
Institution: The University of Tokyo
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1985849703
