Work

Fabrication of SOI photonic crystal slabs by soft UV-nanoimprint lithography

Year: 2006

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2005.12.025

Authors: Michele Belotti, Jérémi Torres, Emmanuel Roy, Anne Pépin, Dario Gerace, Lucio C. Andreani, Matteo Galli, Yong Chen

Institutions: Centre National de la Recherche Scientifique, University of Pavia, Istituto Nazionale per la Fisica della Materia

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: European Commission

Awards: G312237886, G4389345363

OpenAlex ID: W1986259348

FWCI: 2.44

Cites: 21

Cited by: 18

Related to: 10