Work

Conducting atomic force microscopy study of silicon dioxide breakdown

Year: 1995

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.588113

Authors: S. J. O’Shea, R. M. Atta, M. P. Murrell, M. E. Welland

Institution: University of Cambridge

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1986703273

FWCI: 1.968

Cites:

Cited by: 148

Related to: 10