Work

Three-Dimensional Nanofabrication with Elastomeric Phase Masks

Year: 2007

Type: article

Source: The Journal of Physical Chemistry B

DOI: 10.1021/jp074093j

Authors: Daniel J. Shir, Seokwoo Jeon, Hongwei Liao, Matthew Highland, David G. Cahill, Mehmet F. Su, Ihab F. El-Kady, Christos G. Christodoulou, Gregory R. Bogart, Alex V. Hamza, John A. Rogers

Institutions: Lawrence Livermore National Laboratory, University of Illinois Urbana-Champaign, University of New Mexico, Sandia National Laboratories, Columbia University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1986716711

FWCI: 4.806

Cites: 106

Cited by: 67

Related to: 10