Work

Yield enhancement in micromechanical sensor fabrication using statistical process control

Year: 1997

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.284491

Authors: Jeffrey T. Borenstein, Douglas M. Preble

Institution: Draper Laboratory

Language: English

Topic: Advanced Statistical Process Monitoring

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W1986754990

FWCI: 3.889

Cites:

Cited by: 3

Related to: 10