Work

Parallel and hierarchical postprocessing for variable spot electron beam lithography

Year: 1998

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.590363

Authors: Gregory J. Dick, Abigail S. Ganong, Chising Lai, Mary L. Merillat, John W. Pavick

Institution: IBM (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W1986772320

FWCI:

Cites: 1

Cited by:

Related to: 10