Improvement on OPC completeness through pre-OPC hot spot detection and fix
Year: 2008
Type: conference-paper
DOI: 10.1117/12.772409
Authors: Yeonah Shim, Jaeyoung Choi, Jeahee Kim, Bo Su, Ping Zhang, Keun-Young Kim
Institution: Dongbu HiTek (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1987141025